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Investigation of Vibrational Bonding Modes in Hydrogenated Silicon Thin Films Near the Amorphous-to-Nanocrystalline Transition via Argon-Diluted Silane PECVD

Crossref DOI link: https://doi.org/10.1007/s12633-025-03340-5

Published Online: 2025-05-23

Published Print: 2025-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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