Investigation of EPI Plug Voids Impacts on Electrical Performance of 3D NAND
Crossref DOI link: https://doi.org/10.1007/s12633-025-03533-y
Published Online: 2025-12-09
Published Print: 2026-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sahoo, Dibyadrasta
Gaurav, Ankit
Lone, Mohd Ashraf
Manhas, Sanjeev Kumar
Text and Data Mining valid from 2025-12-09
Version of Record valid from 2025-12-09
Article History
Received: 14 April 2025
Accepted: 19 November 2025
First Online: 9 December 2025
Declarations
:
: The authors declare no competing interests.