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Study on the Synergistic Effect of Water-soluble Polymers on the Surface Properties of Silicon Wafers

Published Online: 2026-01-07

Published Print: 2026-02

Authors

Zhao, Peng

Chen, Yulin

Wang, Jige

Zhao, Zhiyuan

Yang, Meng

Zhang, Zefang
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Text and Data Mining valid from 2026-01-07

Version of Record valid from 2026-01-07
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Article History

Received: 20 July 2025

Accepted: 18 December 2025

First Online: 7 January 2026

Declarations

:

: The authors declare no competing interests.

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