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Study of Hydrogenated Amorphous Silicon Nitride Deposition by DC Magnetron Sputtering without Intentional Substrate Heating

Published Online: 2026-01-07

Published Print: 2026-02

Authors

Mokeddem, Kamel

Bouaouina, Boudjemaa

Kechouane, Mohamed
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Text and Data Mining valid from 2026-01-07

Version of Record valid from 2026-01-07
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Article History

Received: 30 August 2025

Accepted: 25 December 2025

First Online: 7 January 2026

Declarations

: This study did not involve human participants or animals. Therefore, ethical approval and informed consent were not required.

: The authors declare no competing interests.

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