Calibration of a Built-in Vacuum Sensor in a Gas Pressure Balance Down to 1 Pa Using RPG (Reverse-Operated Piston Gauge)
Crossref DOI link: https://doi.org/10.1007/s12647-017-0234-4
Published Online: 2017-11-07
Published Print: 2018-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Woo, Sam Yong
Yang, Tae Heon
Song, Han Wook
Funding for this research was provided by:
Korea Research Institute of Standards and Science
License valid from 2017-11-07