Radwan, Hammed A.
Marei, Jassim M.
Khalefa, Abed A.
Rzaij, Jamal M. http://orcid.org/0000-0003-2287-3083
Article History
Received: 3 January 2023
Accepted: 2 June 2023
First Online: 20 June 2023
Declarations
:
: The authors declare that they have no known competing financial interests or personal relationships that could have influenced the work reported in this paper.
: In this study, the detection of low nitrogen dioxide concentrations was applied using the pulsed laser deposition method to deposit zinc oxide nanoparticles on a silicon substrate. A fast, low-cost, effective, and safe method was used to etch the silicon substrate to enhance the zinc oxide film's sensitivity characteristics. In addition to studying the etching influences on the sensitivity characteristics of ZnO, the interaction mechanism between the gas and the surface of the sensor was addressed. Finally, the effect of increasing the nitrogen dioxide concentration on the sensing characteristics of the deposited films was analyzed. A relation between sensitivity and gas concentration was proposed based on the obtained results of the sensor, and it demonstrated a good agreement with the study's findings.