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Effect of substrate temperature on properties of deposited Nb2O5 thin films prepared by RF sputtering for gas sensing applications

Crossref DOI link: https://doi.org/10.1007/s12648-024-03152-0

Published Online: 2024-04-03

Published Print: 2024-11

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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