Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats
Crossref DOI link: https://doi.org/10.1007/s12650-019-00620-2
Published Online: 2019-12-18
Published Print: 2020-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Park, Chan-Woo
Kim, Tae-Gun
Kim, Min-Woo
Aldalbahi, Ali
El-Newehy, Mohamed
Yoon, Sam S. https://orcid.org/0000-0002-9031-4198
Text and Data Mining valid from 2019-12-18
Version of Record valid from 2019-12-18
Article History
Received: 31 May 2019
Revised: 7 August 2019
Accepted: 9 November 2019
First Online: 18 December 2019