Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers
Crossref DOI link: https://doi.org/10.1007/s13204-015-0468-9
Published Online: 2015-06-12
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Memon, Imran
Shen, Yannan
Khan, Abdullah
Woidt, Carsten
Hillmer, Hartmut
License valid from 2015-06-12