Tradeoff Control of Multi-exposure Lithography for SU-8 Photochemical Reaction Channel Formation
Crossref DOI link: https://doi.org/10.1007/s13206-020-4405-y
Published Online: 2020-10-27
Published Print: 2020-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chen, Qi-Ming
Zhou, Jin-Yun http://orcid.org/0000-0001-5828-0082
Hu, Yi-Ming
Zheng, Qi
Text and Data Mining valid from 2020-10-27
Version of Record valid from 2020-10-27
Article History
Received: 30 March 2020
Accepted: 14 June 2020
First Online: 27 October 2020