Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
Crossref DOI link: https://doi.org/10.1007/s13320-019-0537-x
Published Online: 2019-03-14
Published Print: 2019-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Song, Ying
Bayanheshig,
Li, Shuo
Jiang, Shan
Wang, Wei
Text and Data Mining valid from 2019-03-14
Article History
Received: 26 October 2018
Revised: 9 January 2019
First Online: 14 March 2019