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Numerical Investigation of Reactive Species Generation in $$He/O_2$$ Admixture Capacitively Coupled Plasma

Published Online: 2020-10-01

Published Print: 2021-06

Authors

Kechidi, Ziane https://orcid.org/0000-0002-2225-3506
Zitouni, Hannachi

Tahraoui, Abdelatif

Belbachir, Ahmed Hafid

Bendella, Soumia
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Text and Data Mining valid from 2020-10-01

Version of Record valid from 2020-10-01
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Article History

Received: 20 April 2020

Accepted: 17 September 2020

First Online: 1 October 2020

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