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Enhancing the Crystal Quality of AlN Thin Films on Patterned Sapphire Substrates Using Temperature-Modulated Growth in the PALE Technique

Crossref DOI link: https://doi.org/10.1007/s13369-025-10248-0

Published Online: 2025-05-23

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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