The effect of Al interlayers on the growth of AlN on Si substrates by metal organic chemical vapor deposition
Crossref DOI link: https://doi.org/10.1007/s13391-014-3371-8
Published Online: 2014-11-10
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Xun
Li, Haiqiang
Wang, Jing
Xiao, Lei
Text and Data Mining valid from 2014-11-01