3-D Observation of dopant distribution at NAND flash memory floating gate using Atom probe tomography
Crossref DOI link: https://doi.org/10.1007/s13391-014-4194-3
Published Online: 2015-01-10
Published Print: 2015-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Ji-hyun
Chae, Byeong-Kyu
Kim, Joong-Jeong
Lee, Sun Young
Park, Chan Gyung
Text and Data Mining valid from 2015-01-01