Chemical bond structure and MOSFET device damages of electron beam cured siloxane spin-on-dielectric films
Crossref DOI link: https://doi.org/10.1007/s13391-014-4199-y
Published Online: 2014-11-10
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Pyo, Sung Gyu
Text and Data Mining valid from 2014-11-01