Influence of Microstructure on the Electrical Properties of Heteroepitaxial TiN Films
Crossref DOI link: https://doi.org/10.1007/s13391-018-0035-0
Published Online: 2018-03-01
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Xiang, Wenfeng
Liu, Yuan
Zhang, Jiaqi
Funding for this research was provided by:
National Nature Science Foundation of Beijing (4142047)
Text and Data Mining valid from 2018-03-01
Article History
Received: 26 July 2017
Accepted: 11 December 2017
First Online: 1 March 2018