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Enhancing Hydrogen Radical Resistance in Graphene-Based EUV Pellicles via Mo and Mo2C Capping Layers

Published Online: 2025-10-18

Published Print: 2026-01

Authors

Nam, Jeong-Uk

Jeon, Se-Hun

Choi, Young-Geun

Woo, Yun Sung https://orcid.org/0000-0002-4588-313X
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Text and Data Mining valid from 2025-10-18

Version of Record valid from 2025-10-18
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Article History

Received: 29 August 2025

Accepted: 25 September 2025

First Online: 18 October 2025

Declarations

:

: The authors declare no conflict of interest.

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