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Synthesis and Characterization of Cadmium Tin Oxide for MEMS Substrates and Its Comparative Computational Study with Silicon and Silicon Carbide

Crossref DOI link: https://doi.org/10.1007/s13538-024-01624-6

Published Online: 2024-10-22

Published Print: 2024-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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