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An interesting route using electron-beam lithography and photolithography to pattern submicron interdigitated electrodes array for sensing applications

Crossref DOI link: https://doi.org/10.1007/s13738-019-01752-w

Published Online: 2019-08-19

Published Print: 2020-01

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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