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Speciation analysis of inorganic Sb leached from InSb thin films by hydride generation–microwave plasma-atomic emission spectroscopy

Published Online: 2023-07-09

Published Print: 2023-10

Authors

Fujihara, Junko https://orcid.org/0000-0001-5359-5181
Nishimoto, Naoki https://orcid.org/0000-0002-5854-7848
Funding

Funding for this research was provided by:

Japan Society for the Promotion of Science (21H03212)
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Text and Data Mining valid from 2023-07-09

Version of Record valid from 2023-07-09
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Article History

Received: 10 November 2022

Accepted: 29 June 2023

First Online: 9 July 2023

Declarations

:

: The authors declare no conflicts of interest.

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