Crossmark

Feedforward compensation for hysteresis and dynamic behaviors of a high-speed atomic force microscope scanner

Crossref DOI link: https://doi.org/10.1007/s40042-021-00376-9

Published Online: 2022-01-05

Published Print: 2022-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Otieno, Luke Oduor https://orcid.org/0000-0003-3129-2010
Nguyen, Thi Thu https://orcid.org/0000-0003-0732-5812
Park, Sang Joon https://orcid.org/0000-0002-3259-1074
Lee, Yong Joong https://orcid.org/0000-0001-5254-8041
Alunda, Bernard Ouma https://orcid.org/0000-0003-0283-6525
License Information

Text and Data Mining valid from 2022-01-05

Version of Record valid from 2022-01-05
More Information

Article History

Received: 5 October 2021

Revised: 8 November 2021

Accepted: 15 November 2021

First Online: 5 January 2022