Study on TiN film growth mechanism using spectroscopic ellipsometry
Crossref DOI link: https://doi.org/10.1007/s40042-021-00395-6
Published Online: 2022-01-05
Published Print: 2022-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jung, Yong Woo
Lee, Rae Seo
Kim, Jin Ho
Gim, Yu Seong
Kim, Dong Gi
Kim, Moon Gil
Kim, Dae Jong
Jang, Dong Su
Text and Data Mining valid from 2022-01-01
Version of Record valid from 2022-01-01
Article History
Received: 17 December 2021
Accepted: 20 December 2021
First Online: 5 January 2022