Method for improving electrical property of polysilicon film used to light absorption layer of photodetector
Crossref DOI link: https://doi.org/10.1007/s40042-022-00399-w
Published Online: 2022-01-21
Published Print: 2022-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Jae-Sung http://orcid.org/0000-0001-5363-4566
Text and Data Mining valid from 2022-01-21
Version of Record valid from 2022-01-21
Article History
Received: 27 September 2021
Revised: 17 November 2021
Accepted: 20 December 2021
First Online: 21 January 2022