Effective methods for eliminating (NH4)2SiF6 powders generated on Si3N4 wafers processed by HF VPD
Crossref DOI link: https://doi.org/10.1007/s40042-022-00625-5
Published Online: 2022-10-13
Published Print: 2022-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kwon, Hyo-Jun
Park, Jea-Gun
Text and Data Mining valid from 2022-10-13
Version of Record valid from 2022-10-13
Article History
Received: 14 September 2022
Revised: 19 September 2022
Accepted: 19 September 2022
First Online: 13 October 2022