In situ monitoring of plasma ignition step during photoresist stripping using O2/N2 and O2/Ar
Crossref DOI link: https://doi.org/10.1007/s40042-022-00665-x
Published Online: 2022-11-14
Published Print: 2023-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Kyung Eon
Kang, Ju Eun
Hong, Sang Jeen http://orcid.org/0000-0002-6576-690X
Text and Data Mining valid from 2022-11-14
Version of Record valid from 2022-11-14
Article History
Received: 26 August 2022
Accepted: 12 October 2022
First Online: 14 November 2022