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Enhancement of electrical properties of SnO2 ultra-thin film grown by thermal atomic layer deposition

Crossref DOI link: https://doi.org/10.1007/s40042-022-00672-y

Published Online: 2022-12-07

Published Print: 2023-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Lee, Hyeong Woo

Kim, Sungjun

Kim, Jeha https://orcid.org/0000-0001-9022-2384
Kim, Eundo
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Text and Data Mining valid from 2022-12-07

Version of Record valid from 2022-12-07
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Article History

Received: 7 October 2022

Revised: 20 October 2022

Accepted: 14 November 2022

First Online: 7 December 2022