Improved deposition of ZnO:Ga thin films by sputtering with the chamber pressure
Crossref DOI link: https://doi.org/10.1007/s40042-023-00931-6
Published Online: 2023-09-28
Published Print: 2023-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Deok Kyu
Text and Data Mining valid from 2023-09-28
Version of Record valid from 2023-09-28
Article History
Received: 3 July 2023
Revised: 20 July 2023
Accepted: 16 August 2023
First Online: 28 September 2023