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Oxidation behavior of Pt–Ru bimetallic thin films as gate electrodes by atomic layer deposition

Published Online: 2024-12-23

Published Print: 2025-02

Authors

Kim, Young-Wan

Woo, Hyun-Jae

Lee, Hyunju

Kwon, Se-Hun

Lee, Woo-Jae
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Text and Data Mining valid from 2024-12-23

Version of Record valid from 2024-12-23
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Article History

Received: 16 July 2024

Revised: 9 September 2024

Accepted: 26 September 2024

First Online: 23 December 2024

Declarations

:

: The authors declare no competing financial interest.

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