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On-chip electrical excitation of micromembrane for fully integrated high-frequency, multi-mode optomechanical resonator

Crossref DOI link: https://doi.org/10.1007/s40042-025-01368-9

Published Online: 2025-05-19

Published Print: 2025-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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