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Dependence of ozone concentration on the moisture barrier properties of aluminum oxide using atomic layer deposition

Published Online: 2025-06-10

Published Print: 2025-08

Authors

Choi, Yeongtae

Shin, Seokyoon

Byun, Changwoo

Kim, Hee-Soo

Jeon, Hyeongtag
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Text and Data Mining valid from 2025-06-10

Version of Record valid from 2025-06-10
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Article History

Received: 6 December 2024

Revised: 6 March 2025

Accepted: 30 May 2025

First Online: 10 June 2025

Declarations

:

: The authors declare no competing interests.

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