Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation
Crossref DOI link: https://doi.org/10.1007/s40094-015-0199-z
Published Online: 2016-01-14
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Khoram, Mansour http://orcid.org/0000-0003-2352-9364
Ghomi, Hamid
License valid from 2016-01-14