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Sputter-Deposited Mo Thin Films: Multimodal Characterization of Structure, Surface Morphology, Density, Residual Stress, Electrical Resistivity, and Mechanical Response

Crossref DOI link: https://doi.org/10.1007/s40192-023-00297-4

Published Online: 2023-04-24

Published Print: 2023-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Kalaswad, M.

Custer, J. O.

Addamane, S.

Khan, R. M.

Jauregui, L.

Babuska, T. F.

Henriksen, A.

DelRio, F. W.

Dingreville, R.

Boyce, B. L.

Adams, D. P.
Funding

Funding for this research was provided by:

U.S. Department of Energy
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Text and Data Mining valid from 2023-04-24

Version of Record valid from 2023-04-24
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Article History

Received: 5 January 2023

Accepted: 14 March 2023

First Online: 24 April 2023

Declarations

:

: The authors declare that they have no conflict of interest.

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