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Critical Role of Intermetallic Particles in the Corrosion of 6061 Aluminum Alloy and Anodized Aluminum Used in Semiconductor Processing Equipment

Published Online: 2025-03-28

Published Print: 2025-06

Authors

Zhao, Yang

He, Bo

Yang, Jinliang

Liu, Yongxiang

Zhang, Tao

Wang, Fuhui
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Text and Data Mining valid from 2025-03-28

Version of Record valid from 2025-03-28
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Article History

Received: 3 September 2024

Revised: 7 December 2024

Accepted: 24 December 2024

First Online: 28 March 2025

Declarations

:

: The authors state that there are no conflicts of interest to disclose.

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