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Nonlinear dynamic analysis of electrostatically actuated dual-axis micromirrors

Crossref DOI link: https://doi.org/10.1007/s40430-022-03948-3

Published Online: 2023-02-07

Published Print: 2023-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Chahari, Mahmood https://orcid.org/0000-0003-4743-663X
Ahmadian, Mohammad Taghi

Firoozbakhsh, Keikhosrow
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Text and Data Mining valid from 2023-02-07

Version of Record valid from 2023-02-07
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Article History

Received: 9 April 2022

Accepted: 5 December 2022

First Online: 7 February 2023