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Key machining characteristics in ultrasonic vibration cutting of single crystal silicon for micro grooves

Published Online: 2019-07-05

Published Print: 2019-09

Authors

Chen, Jun-Yun https://orcid.org/0000-0003-2458-6598
Jin, Tian-Ye

Luo, Xi-Chun
Funding

Funding for this research was provided by:

National Natural Science Foundation of China (51775482)

Natural Science Foundation of Hebei Province (E2016203372)
License Information

Text and Data Mining valid from 2019-07-05

Version of Record valid from 2019-07-05
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Article History

Received: 29 December 2018

Revised: 2 April 2019

Accepted: 17 June 2019

First Online: 5 July 2019

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