Phase Analysis of Laser Direct Etching and Water Assisted Laser Combined Etching of SiC Ceramics
Crossref DOI link: https://doi.org/10.1007/s40516-017-0044-0
Published Online: 2017-11-09
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yuan, Genfu https://orcid.org/0000-0003-1300-3668
Cong, Qidong
Zhang, Chen
Xie, Bingbing
Funding for this research was provided by:
National Natural Science Foundation of China (51175229)
License valid from 2017-11-09