Preparation of Ag2O modified silica abrasives and their chemical mechanical polishing performances on sapphire
Crossref DOI link: https://doi.org/10.1007/s40544-017-0156-8
Published Online: 2017-06-16
Published Print: 2017-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Baichun
Lei, Hong
Chen, Yi
License valid from 2017-06-16