Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology
Crossref DOI link: https://doi.org/10.1007/s40544-017-0189-z
Published Online: 2017-12-29
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Hu, Yueqiang
Meng, Yonggang
Text and Data Mining valid from 2017-12-29
Version of Record valid from 2017-12-29
Article History
Received: 13 April 2017
Revised: 30 May 2017
Accepted: 2 September 2017
First Online: 29 December 2017