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Alumina film sputter deposition on mold steel by large-area electron beam irradiation

Published Online: 2020-07-03

Published Print: 2021-09

Authors

Shinonaga, Togo https://orcid.org/0000-0002-7001-8594
Takata, Masashi

Inoue, Motohiro

Okada, Akira
Funding

Funding for this research was provided by:

Japan Society for the Promotion of Science (16H04248)
License Information

Text and Data Mining valid from 2020-07-03

Version of Record valid from 2020-07-03
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Article History

Received: 24 September 2019

Revised: 5 June 2020

Accepted: 16 June 2020

First Online: 3 July 2020

Document is current