Space–Time Coupled Finite Element Simulation of PECVD Reactor
Crossref DOI link: https://doi.org/10.1007/s40819-015-0061-7
Published Online: 2015-05-07
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dehghanifard, Z.
Ahmadi, A. R.
Ganjovi, A. R.
Bolorizadeh, M. A.
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