A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
Crossref DOI link: https://doi.org/10.1007/s40820-018-0189-1
Published Online: 2018-02-02
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mathew, Ribu
Ravi Sankar, A.
Text and Data Mining valid from 2018-02-02
Article History
Received: 3 November 2017
Accepted: 2 January 2018
First Online: 2 February 2018