Crossmark

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

Published Online: 2021-06-18

Published Print: 2021-11

Authors

Gao, Peili

Liu, Tingting

Zhang, Zhenyu

Meng, Fanning

Ye, Run-Ping

Liu, Jian
License Information

Text and Data Mining valid from 2021-06-18

Version of Record valid from 2021-06-18
More Information

Article History

Received: 25 March 2021

Accepted: 29 March 2021

First Online: 18 June 2021

Ethics

: <b>Conflict of interest</b> The authors declare that they have no conflict of interest.

Document is current