Crossmark

Radiation chemistry of a novel zinc–oxo cluster crosslinking strategy for EUV patterning

Published Online: 2024-04-08

Published Print: 2024-05

Authors

Si, Youming

Zhou, Danhong

Zhao, Jun

Peng, Yifeng

Chen, Pengzhong

Fan, Jiangli

Peng, Xiaojun
License Information

Text and Data Mining valid from 2024-04-08

Version of Record valid from 2024-04-08
More Information

Article History

Received: 26 December 2023

Accepted: 19 February 2024

First Online: 8 April 2024

Ethics

: <b>Conflict of interest</b> The authors declare that they have no conflict of interest.

Document is current