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Balancing sensitivity and resolution by feedback regulation of free radicals from Sn-C bonds in tin-oxygen clusters EBL photoresist

Published Online: 2024-08-22

Published Print: 2024-10

Authors

Chen, Hao

Huang, Xinyan

Zhao, Yingdong

Zhao, Jun

Chen, Pengzhong

Peng, Xiaojun
License Information

Text and Data Mining valid from 2024-08-22

Version of Record valid from 2024-08-22
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Article History

Received: 12 June 2024

Accepted: 24 July 2024

First Online: 22 August 2024

Ethics

: <b>Conflict of interest</b> The authors declare that they have no conflict of interest.

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