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Effect of quenching and tempering on microstructure and properties of Super Invar alloy fabricated by laser powder bed fusion for semiconductor equipment

Crossref DOI link: https://doi.org/10.1007/s40964-025-01321-z

Published Online: 2025-08-28

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zhao, Renjie

Shi, Lu

Feng, Kai

Li, Zhuguo

Xie, Renbiao
Funding

Funding for this research was provided by:

National Key R&D Program of China (2022YFB4602102)

Shanghai Collaborative Innovation Project (HCXBCY-2023-064)
License Information

Text and Data Mining valid from 2025-08-28

Version of Record valid from 2025-08-28
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Article History

Received: 20 March 2025

Accepted: 20 August 2025

First Online: 28 August 2025

Declarations

:

: The authors declare no conflict of interest.

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