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A novel adaptation of Naive Bayes methods for improving semiconductor fab yield

Published Online: 2024-06-06

Published Print: 2025-09

Authors

Dayaratna, Kevin D.

McFarlane, Michael C.
Funding

Funding for this research was provided by:

Lam Research (NA)
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Text and Data Mining valid from 2024-06-06

Version of Record valid from 2024-06-06
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Article History

Received: 12 December 2023

Accepted: 30 April 2024

First Online: 6 June 2024

Document is current