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Vision-based wafer inspection in semiconductor manufacturing: a case study on scratch defect detection using synthetic data and YOLO models

Crossref DOI link: https://doi.org/10.1007/s41060-026-01034-8

Published Online: 2026-02-26

Published Print: 2026-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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