Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy
Crossref DOI link: https://doi.org/10.1007/s41365-017-0212-0
Published Online: 2017-03-28
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Han, Bin
Wang, Ze-Song
Neena, D.
Lin, Bao-Zhu
Yang, Bing
Liu, Chuan-Sheng
Fu, De-Jun
License valid from 2017-03-28