Enhanced removal of X-ray-induced carbon contamination using radio-frequency Ar/H2 plasma
Crossref DOI link: https://doi.org/10.1007/s41365-019-0547-9
Published Online: 2019-01-18
Published Print: 2019-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wang, Yi
Lu, Qi-Peng
Gao, Yun-Guo
Gong, Xue-Peng
Song, Yuan
Text and Data Mining valid from 2019-01-18
Article History
Received: 13 December 2017
Revised: 21 June 2018
Accepted: 6 August 2018
First Online: 18 January 2019